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SEMATECH
Xidex Corporation, in collaboration with the Department of Chemistry and
Biochemistry at UT Austin, has developed one of Texas' first commercial
applications of nanotechnology for semiconductor production using
technical resources at SEMATECH's Advanced Technology Development Facility
(ATDF). The process uses carbon nanotubes (CNTs) as surface sensors for
scanning probe microscopes (SPMs). The work is being done with funding
from the Advanced Materials Research Center (AMRC) under a contract with
SEMATECH that began in late 2004. The AMRC was launched in March 2004 by
the State of Texas and SEMATECH to work with the UT System and other Texas
universities in investigating promising new semiconductor technologies
that will ensure the state.s high tech future.
In 1998, International SEMATECH's Advanced Metrology Advisory Group
partnered with Xidex by funding an early prototype of Xidex's
critical-dimension atomic force microscope (CD-AFM). This prototype was
successfully demonstrated for International SEMATECH in 2000 and paved the
way for subsequent development of our dual-probe
NanoCaliperTM AFM.
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