Publications:
Scientific

P.F. McClure and V. Mancevski, "Calibration of a dual-probe NanoCaliper^TM AFM for CD metrology," Presented at the SPIE Microlithography 2005 Conference, San Jose California, February 27-March4, 2005.

V. Mancevski and P. F. McClure, "Development of a dual-probe Caliper^TM CD-AFM for near model-independent nanometrology," Proc. of the SPIE. Metrology, Inspection and Process Control for Microlithography XVI. 4-7 March, 2003 Vol. 4689. pp. 83-91.

M. D. Chabot, T. C. Messina, V. Mancevski, C. W. Miller, and J. T. Markert, "Single-crystal silicon triple-torsional micro-oscillators for use in magnetic resonance force microscopy," The SPIE Proceedings Vol. 4559, 24.35 (2001).