This tutorial describes a method for TEM sample preparation in a single beam FIB tool equipped with Xidex’s NanoBot nanomanipulator. The exceptional ease of use of the NanoBot system, its ultra-low drift (< 1 nm/min) and its stable multi-mode operation in three orthogonal directions make it ideal for use in TEM sample preparation where the slightest unwanted motion during critical welding, milling and positioning operations can destroy a sample in which hours of valuable time have already been invested. The extraordinary ease-of-use of the NanoBot nanomanipulator makes it possible for the operator of a singlebeam FIB tool to seamlessly perform the required sequence of delicate probe landing and sample positioning maneuvers, taking advantage of intuitive joystick control and voice feedback generated by the system’s LabVIEW interface.
TEM Sample Preparation in a Single-Beam FIB Using Xidex’s NanoBot® Nanomanipulator
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This brief case study demonstrates how the NanoBot system’s X,Y,Z end effector probe can deftly position a variety of gold nanoparticles. A simple dimer was created easily in a manner of just minutes, by a user WHO HAD NEVER EVEN RUN THE SYSTEM prior to these experiments. Researchers who had worked with other nanomanipulator platforms for several years, found that comparable results took orders of magnitude longer to achieve.
Vapor Phase Editing of Carbon Nanotube Based Nanodevices: Using the NanoBot® System with Gas Delivery
This Application Note describes an editing process for: (1) precise nanometer-scale linear etching operations, including carbon nanotube (CNT) cutting, shortening, cleaning, and other operations involving individual CNTs, and (2) precise micron-scale area etching operations, including cleaning entire areas of unwanted nanotube overgrowth. All of these operations were achieved using the NanoBot® nanomanipulator equipped with Xidex’s Parallel Parallel Gas Injection system.
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Electrical Characterization of an Electron Beam Deposited Pt Probe
This application note describes a method for electrical characterization of a Pt nanotip fabricated on the end of a sharp W probe using electron beam induced deposition (EBID) performed using Xidex’s Parallel Multi-Precursor Gas Delivery (MPGD) system. The W probe carrying the Pt nanotip was mounted on the XYZ nanopositioner of Xidex’s NanoBot® system, which provides the high level of mechanical stability needed to hold the probe tip in contact with a Cu substrate during electrical testing.
AFM Cantilever spring Constant Calibration Using the NanoBot® Nanomanipulator with a Force Sensor Attachment
This Application Note describes a method by which Xidex’s NanoBot® nanomanipulator can be used to calibrate the spring constant of an atomic force microscope (AFM) cantilever by deflecting the AFM tip with a calibrated force sensor module mounted as an end effector. The method as described here uses a NanoBot system installed in a scanning electron microscope (SEM). However the method can also be applied in air using a high resolution optical microscope. Spring constants determined by the method apply directly to situations where static deflection is of primary importance. These involve contact mode and colloidal probe AFM measurements, and other measurements involving interfacial forces or bonding forces between atoms or molecules.
Fabrication and Testing of High Resolution Electrical Probes Using the NanoBot® System
Xidex’s NanoBot® nanomanipulator and the optional Parallel Gas Injection System make it possible to custom-fabricate high resolution electrical probes for use in a wide variety of nanoscience applications in industry and academia. In the applications described here high resolution electrical probes are fabricated in the sample chamber of a scanning electron microscope (SEM) using two different methods starting with conventional sharp tungsten (W) probes: (1) attaching a carbon nanotube (CNT) tip to a sharp W probe using a platinum (Pt) weld; and (2) using electron beam-induced deposition (EBID) to fabricate a high aspect ratio Pt nanotip on the apex of a W probe. In both methods, the ultra-low drift, dexterity and ease of use of the NanoBot system play an important role by enabling the required operations to be performed in a few minutes and with minimal operator training.
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Carbon Nanotube AFM Tip Fabrication Using the NanoBot® System
A carbon nanotube (CNT) attached to the end of a conventional silicon (Si) atomic force microscope (AFM) tip enables scanning with higher spatial resolution and less tip wear than would otherwise be possible. The exceptional ease of use and mechanical stability of the NanoBot system make it possible to quickly accomplish this important nanofabrication task inside a scanning electron microscope (SEM).
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